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Lifetime Stability and Microstructure Properties of Cr/B4C X-ray Reflective Multilayer Coatings

Abstract : This paper demonstrates that highly reflective Cr/B 4 C multilayer interference coatings with nano-metric layer thicknesses, designed to operate in the soft X-ray photon energy range, have stable reflective performance for a period of 3 years after deposition. The microstructure and chemical composition of layers and interfaces within Cr/B 4 C multilayers is also examined, with emphasis on the B 4 Con -Cr interface where a significant diffusion layer is formed and on the oxide in the top B 4 C layer. Multiple characterization techniques (X-ray reflectivity at different photon energies, X-ray pho-toelectron spectroscopy, transmission electron microscopy, electron diffraction and X-ray diffraction) are employed and the results reveal a consistent picture of the Cr/B 4 C layer structure.
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Submitted on : Wednesday, November 21, 2018 - 8:48:34 AM
Last modification on : Monday, January 10, 2022 - 10:16:07 AM
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Catherine Burcklen, Regina Soufli, Jennifer Rebellato, Christopher Walton, Evgueni Meltchakov, et al.. Lifetime Stability and Microstructure Properties of Cr/B4C X-ray Reflective Multilayer Coatings. Journal of Nanoscience and Nanotechnology, American Scientific Publishers, 2019, 19 (1), pp.554 - 561. ⟨10.1166/jnn.2019.16480⟩. ⟨hal-01909382⟩



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